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Adixen ASM 182 TD PLUS - Page 19

Adixen ASM 182 TD PLUS
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2/5
A 201
ASM 192 T2D+
detector operating principle
GB 01358 - Edition 03 - September 04
GB 01358 - Edition 03 - September 04
3/5
A 201
ASM 192 T2D+
detector operating principle
3
Gross leak test mode
3 mbar < Inlet Pressure < 30 mbar




Note : Only operational parts are represented.
1
Stand by
V
S
V
T1
18
15
2
17
1
Primary roughing
2
3
15
VT1
Operation in vacuum
test mode

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