Alicat MC Series User Manual

64
Specication Sheets
Technical Data for Alicat MC and MCR Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 5000 slpm Full Scale
Standard Operating Specications (Contact Alicat for available options)
Performance MC & MCR Mass Flow Controller
Accuracy at calibration
conditions after tare
± (0.8% of Reading + 0.2% of Full Scale)
High Accuracy at calibration
conditions after tare
± (0.4% of Reading + 0.2% of Full Scale)
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Repeatability ± 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown
Maximum Controllable Flow Rate 102.4% Full Scale
Maximum Measurable Flow Rate up to 128% Full Scale (Gas Dependent)
Typical Response Time 100 ms (Adjustable)
Warm-up Time < 1 Second
Communications / Power MC & MCR Mass Flow Controller
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Communications Options
1
RS-232 Serial, RS-485 Serial, DeviceNet, EtherCAT, EtherNet/IP,
Modbus RTU, Modbus TCP/IP, PROFIBUS
Analog Input/Output Signal
2
Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options 8 pin Mini-DIN, 9 pin D-sub (DB9), 15 pin D-sub (DB15), 6 pin locking, 8 pin M12
Supply Voltage MC: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) MCR: 24 to 30 Vdc
Supply Current MC: 0.250 Amp MCR: 0.750 Amp (MCRH: 2.0 Amp)
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature.
Operating Conditions MC & MCR Mass Flow Controller
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Operating Temperature −10 to +60 ºCelsius
Humidity Range (Non–Condensing) 0 to 100%
Max. Internal Pressure (Static) 145 psig
Proof Pressure 175 psig
Mounting Attitude Sensitivity MC: None MCR: Mount with valve cylinder vertical & upright
Valve Type Normally Closed
Ingress Protection IP40
Wetted Materials
MC: 303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced
Polyphenylene Sulde, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR Stainless
Steel, Silicon, Glass.
MCR: 303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Rein-
forced Polyphenylene Sulde, Heat Cured Epoxy, Aluminum, Gold, 416 Stainless Steel,
Silicon, Glass. If your application demands a di󰀨erent material, please contact Alicat.
Range Specic Specications
Full Scale Flow Mass
Controller
Pressure Drop
1
at FS Flow
(psid) venting to atmosphere
Mechanical
Dimensions
Process Connections
2
MC 0.5 sccm to 50 sccm 1.0 3.9”H x 3.4”W x 1.1”D M-5 (10-32) Female Thread
3
MC 100 sccm to 500 sccm 1.0
4.1”H x 3.6”W x 1.1”D 1/8” NPT Female
MC 1 slpm 1.5
MC 2 slpm 3.0
MC 5 slpm 2.0
MC 10 slpm 5.5
MC 20 slpm 20.0
MCR 50 slpm 2.0
5.5”H x 7.7”W x 2.3”D 1/4” NPT Female
MCR 100 slpm 3.2
MCR 250 slpm 2.4 5.5”H x 7.7”W x 2.3”D 1/2” NPT Female
MCR 500 slpm 6.5
5.5”H x 7.4”W x 2.3”D
3/4” NPT Female
(A 1-1/4” NPT Female process
connection is available for
2000 slpm controllers.)
MCR 1000 slpm 14.0
MCR 1500 slpm 17.0
MCR 2000 slpm 28.6 5.5”H x 8.1” W x 2.9” D
MCR 3000 slpm 16.8 5.5”H x 8.9” W x 2.9” D 1-1/4” NPT Female
MCRH 5000 slpm 14.1 6.3”H x 9.8”W x 4.5”D 2” NPT Female
1. Lower Pressure Drops Available, please see our WHISPER-Series mass ow controllers at www.alicat.com/whisper.
2. Compatible with Swagelok® tube, Parker®, face seal, push connect and compression adapter ttings. VCR and SAE
connections upon request.
3. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT ttings.

Alicat MC Series Specifications

General

Brand	Alicat
Model	MC Series
Category	Controller
Language	English