Appendix / Service Details
110 DOC-M88-EXX268_V1_12.2016
Figure10.14: CHC_Stage Chamber Temperature Details
8. All CHC plus templates are configured for cooling with LN2. If you plan to use
compressed air cooling, the minimum temperature must be limited to ‑5°C. This can
be done by changing the Min.Temperature setting in Device| Goniometer|
Center| CHC_Stage| SampleTemperature to ‑5°C.