Bruker Anton Paar - Vacuum Equipment; Installation of the Edwards High Vacuum Stage with TIC; Mounting of the Edwards High Vacuum Stage

Vacuum Equipment
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3 Vacuum Equipment
Two examples for the installation of vacuum pumps for heating chambers are presented.
One concerns the Edwards turbomolecular pump and its mounting in the front of the D8
enclosure and the second shows how to install the Edwards backing pump.
3.1 Installation of the Edwards High Vacuum Stage with TIC
3.1.1 Mounting of the Edwards High Vacuum Stage
Connecting the vacuum tubes and the components
1. Connect vacuum tubes and components, see the next 3 pictures)
2. Mount the Edwards turbomolecular pump to the flexible bellow
3. Mount the Edwards backing-pump (backing pump) to the flexible vacuum line.