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Bruker Anton Paar - Figure 3.4: Back Sides Of: Edwards Turbomolecular Instrument Controller (TIC, Left Side) and Edwards Relay Box (Right Side)

Bruker Anton Paar
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Vacuum Equipment
30 DOC-M88-EXX268_V1_12.2016
1. Connect the cables:
Figure3.4: Back sides of: Edwards turbomolecular instrument controller (TIC, left side) and Edwards
relay box (right side)
1 Mains supply 6 Terminator plug
2 WRG 7 Connection to TIC
3 Vent valve 8 Mains supply
4 Turbo pump 9 Backing pump
5 Connection to relay box
2. Check the oil level for the backing-pump.
ð The vacuum stage is ready.

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