Vacuum Equipment
30 DOC-M88-EXX268_V1_12.2016
1. Connect the cables:
Figure3.4: Back sides of: Edwards turbomolecular instrument controller (TIC, left side) and Edwards
relay box (right side)
1 Mains supply 6 Terminator plug
2 WRG 7 Connection to TIC
3 Vent valve 8 Mains supply
4 Turbo pump 9 Backing pump
5 Connection to relay box
2. Check the oil level for the backing-pump.
ð The vacuum stage is ready.