Bruker Anton Paar - Operation of the Edwards High Vacuum Stage

Vacuum Equipment
DOC-M88-EXX268_V1_12.2016 31
3.1.2 Operation of the Edwards High Vacuum Stage
Five soft keys on the Turbo Instrument controller (TIC) front are used to control and pro-
gram the TIC. In the figure below the starting screen is shown and the soft keys are de-
scribed, programming is expected to be done. Further information can be found in the
manuals of Edwards.
The controller is delivered pre-programmed for optimal performance with the temperature
chamber.
Figure3.5: Starting screen for the TIC Controller
1. Switch on the Turbo Instrument Controller (TIC), programming is expected to be done.
2. Press Cycle twice when Turbo OFF Back OFF is chosen:
´ The TMP and Backing pump will start.
3. Switch back to the starting screen by pressing the Menu button. Watch the vacuum
pressure. Channel 1 must be connected to Multi (Wide) Range Gauge (MRG or
WRG). Other channels are not connected.
´ The display will show the pressure in mbar.
4. Start the high temperature X-ray measurements when the pressure has reached the
required value (<10
−4
mbar for Ta or other oxygen sensitive heaters) for the installed
chamber.