Bruker Anton Paar - Installation of the Edwards Backing-Pump

Vacuum Equipment
32 DOC-M88-EXX268_V1_12.2016
5. After finishing the measurements, press Cycle twice when Turbo ON Back ON is
chosen:
´ The TMP and Backing pump will stop.
6. Switch back to the starting screen by pressing the Menu button. Observe the vacuum.
ð After some minutes the vent valve will flush the TMP and the temperature chamber can
be opened.
The ventilation will be done automatically. It takes some minutes until the TMP speed has
fallen below 50 %! For further information see the Edwards manuals
3.2 Installation of the Edwards Backing-Pump
Some applications only require a vacuum of about 10
-2
mbar. Therefore a backing-pump is
sufficient. Bruker AXS offers the Edwards backing pump with 12m
3
/h (might be smaller in
actual systems) intake volume.
Figure3.6: Vacuum sensor, flooding valve, tube to chamber and mist-filter mounted