Vacuum Equipment
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It is connected to the chamber with DN25KF flexible metal hoses and equipped with a
vacuum sensor and a manually operated flooding valve. The mist filter absorbs accessing
oil. The vacuum indicating instrument can be placed in - or outside the D8 enclosure.
1. Connect vacuum tubes and components, also see the figure Connecting the vacuum
tube to the heating chamber in the previous chapter.
2. Connect the cables. Choose head 1.
Figure3.7: Display and backside of the vacuum indicating instrument
3. Switch on the Edwards AGD.
4. Check the oil level for the pump.
´ The vacuum stage is ready.
5. Start the system by closing the valve and switching on the rotary pump.
6. Start the temperature X-ray measurements, if the vacuum shows 5*10
-2
mbar at pump.
7. After finishing the measurements, first open the valve and then switch off the rotary
pump.
For further information see the Edwards manuals!