Adjustment of a Chamber on the D8
38 DOC-M88-EXX268_V1_12.2016
Figure4.1: Rocking curve to check chamber rotation error
The alignment of the rotation of the chamber may be done either by physically rotating
the chamber body or by introducing a sofware offset. See the 2 following subchapters
Rotation alignment by physical adjustment of the chamber
1. Align the rotation of the chamber by rotating the body on the alignment stage.
2. Rotate chamber clockwise if the maximum is at negative values and vice versa (see
figure above: A clockwise rotation is necessary here).
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