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EcoMet 300
Buehler EcoMet 300 User Manual
20 pages
Manual
Specs
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NANOSYSTEM
FABRICATION
FACILITY
(NFF),
HKUST
V
ersion 1.0
Page
1
of
20
Standard Operating Manual
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Buehler EcoMet
TM
300
Silicon Polisher
2
Table of Contents
Default Chapter
2
Table of Contents
2
1 Picture and Location
3
2 Process Capabilities
3
Cleanliness Standard
3
Possible Polishing Materials
3
Process Specification
4
3 Contact List and How to Become a Qualified User
5
Emergency Responses and Communications
5
Training to Become a Qualified Ecomet
5
TM 300 User
5
4 Operating Procedures
5
System Description
5
Safety Warnings
6
Operation Precautions and Rules
6
Initial Status Checks
7
Initial System Checks
7
Preparation before Polishing
7
Polish Cloth and Slurry Selection
11
Polish Parameters Setting
13
During the Run
16
Process Recording During the Process
19
Clean up
19
Check out
20
Important Notice
20
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Buehler EcoMet 300 Specifications
General
Type
Grinder-Polisher
Application
Metallographic Sample Preparation
Speed
50-500 RPM
Frequency
50/60 Hz
Disc/Platen Size
8 inch (203 mm)
Voltage
115 V
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