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Celerity UNIT 1660 User Manual

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Table of Contents

Questions and Answers:

Celerity UNIT 1660 Specifications

General IconGeneral
BrandCelerity
ModelUNIT 1660
CategoryMeasuring Instruments
LanguageEnglish

Summary

3. OPTIONAL FEATURES

3.7 Auto-Zero Option

Details the Auto-Zero feature for detecting and re-zeroing offset.

7. INSTALLATION

7.2 Purging before Installing the MFC

Details procedures for purging lines with nitrogen or argon before installation.

7.5 Connecting to gas supply line

Details connecting inlet/outlet fittings using two wrenches.

8. ELECTRICAL CONNECTIONS

8.1 Voltage and Pinouts

Discusses voltage requirements and pinouts for MFCs and Flow Meters.

8.2 Connections to a Power Supply

Explains connecting Celerity power supplies and checking pin assignments.

9. MULTIFLO VIRTUAL INTERFACE

10. OPERATION AND PERFORMANCE CHECKS

10.1 Automatic Zero Initialization

Refers to Appendices 16.3 and 16.7 for Auto Zero Initialization.

10.2 Proper Sequencing

Details proper valve sequencing for MFCs with/without Auto Shut-off.

10.3 Leak Test

Emphasizes leak testing connections with a helium leak detector.

10.4 Purge

Mentions two recommended purging processes for non-reactive and reactive gases.

10.5 Zero Check

Refers to Appendix 16.2 for zero check and remote readout adjustments.

10.6 Full Flow Check

Outlines applying 100% setpoint and verifying 5VDC output.

10.7 Flow Control Response Check

Details closing valve, removing command, and verifying response time.

10.8 Calibration Check

Explains checking calibration using a reference and potential errors with surrogate gas.

11. TROUBLESHOOTING

11.1 Environmental Factors

Lists symptoms and causes related to environmental factors affecting MFC performance.

11.2 MFC Troubleshooting Checklist

Provides a checklist for verifying voltage, grounding, setpoint, and output.

12. REMOVAL

12.1 Purging before removing the MFC

Details purging procedures before removing the MFC to minimize contamination.

16. APPENDICES

16.1 Connector Pinouts

Lists pinouts for MFC, MFM cardedge, and various D-connectors.

16.2 Setting the MFC/MFM Zero

16.2.1 Background

Explains MFC zero drift and the importance of setting zero correctly.

16.2.4 Factory Suggested Zeroing Procedure

Provides a step-by-step procedure for zeroing the MFC.

16.3 9000 Series Supplement

16.3.4 Connect to Gas Supply Line

Instructions for connecting inlet/outlet VCR fittings and tightening.

16.3.5 Connect to Power Supply

Details power supply connections for 9000 Series using Cardedge or D-connectors.

16.4 Troubleshooting Guide

16.4.1 Determining Whether or Not to Remove the MFC

Advises contacting technical support before removing the MFC.

16.7 AUTO-ZERO FEATURE (FOR ANALOG MASS FLOW CONTROLLERS)

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