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General| Maximum Temperature | 1200 °C |
|---|---|
| Heating Zone Length | 260 mm |
| Number of Heating Zones | 3 |
| Category | Furnace |
| Control System | PID controller |
| Atmosphere | Air, inert gas |
Explains warning symbols, danger, warning, and caution indicators used in the manual for safety.
Explains the safety measures implemented to minimize hazards for personnel and system reliability.
Specifies the intended use of the equipment and operational guidelines.
Defines incorrect use and states the manufacturer's non-liability for resulting damages.
Provides general safety rules for personnel and equipment, emphasizing user responsibility for understanding safety chapter.
Lists installed safety devices and emphasizes their importance for safe operation.
Describes the main power switch function as an emergency stop and its operation.
Details the functions of various safety devices and their role in protecting personnel and property.
Contains crucial safety guidelines for operation and handling of the equipment.
Illustrates safety signs and their locations on different assembly groups of the equipment.
Provides instructions and precautions for firefighting, including safety clothing and extinguisher usage.
Describes the function and components of the loading station used for wafer handling.
Explains the structure of the horizontal furnace, divided into stacks with heating cassettes and process tubes.
Lists the tasks performed by the CESAR control computer, including recipe management and temperature control.
Describes the CMS system as a fault indication unit that monitors various equipment parameters.
Lists crucial safety precautions for transporting and handling the equipment, including protective clothing and load safety.
Provides technical guidelines for transport, including ambient temperature, lifting equipment, and handling precautions.
Outlines installation procedures and the connection of media supply lines.
Lists essential checks and settings required before initial startup for reliable operation.
States that initial startup must be performed by centrotherm service personnel.
Explains conditioning for process tubes and boats and procedures for test processing.
Describes safety precautions and procedures for testing the handling system during operation.
Details procedures for safely switching off the equipment, including warnings about quartz tubes.
Outlines the steps to be taken before shutting down the equipment for extended periods.
Describes the layout of the CMI computer's graphical user interface.
Provides instructions for starting up the equipment, including checks of standby status and job list.
Explains how to transition the equipment to Pause, Break, or Empty status.
Covers how alarms are displayed and how to respond to them.
Details the tasks performed by the CESAR control computer user interface.
Explains how the CMS detects and displays disturbances, and the need for acknowledgement.
Provides troubleshooting for error messages related to the lift's movement and positioning.
Lists error messages and troubleshooting for slider and wafer handler operations.
Details error messages and troubleshooting for the External Wafer Handler.
Addresses faulty temperature displays and incorrect gas flow velocity readings from the CESAR control computer.
Provides safety precautions and general steps for replacing assembly groups in the horizontal furnace.
Covers safety precautions and procedures for installing or replacing thermocouples.
Details the critical alignment procedures for the SLS to prevent wafer jams and breakage.
Emphasizes safety precautions when working on the gas system, focusing on explosive and toxic gases.
Details procedures for performing pressure and leakage tests on closed tube and vacuum systems.
Explains the process of temperature profiling for heating cassettes, including safety and reinitialization procedures.
Emphasizes safety requirements for all preventive maintenance work, including trained personnel and hazard warnings.
Explains the careful procedure for performing temperature profiling of heating cassettes.
Covers checks for process tube alignment, SLS position, and coldzone tube alignment.
Emphasizes safety precautions for checking the gas system, focusing on explosive and toxic gases.
Provides guidelines for cleaning or replacing process tubes based on deposition thickness.
Gives instructions for cleaning or replacing process boats based on etching and deposition thickness.
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