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General| Sampling Rate | Up to 10 kHz |
|---|---|
| Wireless Communication | Yes |
| Battery Life | Up to 8 hours |
| Temperature Range | 0°C to 50°C |
| Measurement Range | Varies by specific model |
| Resolution | Varies by specific model |
| Accuracy | Varies by specific model |
| Repeatability | Varies by specific model |
| Weight | Varies by specific model |
| Dimensions | Varies by specific model |
| Description | The CyberOptics WaferSense Auto Multi Sensor (AMS) Series is a wireless measurement system used for automated leveling, vibration, and humidity/temperature measurement in semiconductor wafer processing equipment. |
| Compatibility | Compatible with most semiconductor processing equipment |
Contact information for technical support via email and phone.
Describes prerequisites and the initial steps of the AMS software installation wizard.
Provides instructions for connecting and installing the wireless link module.
Explains how to verify the AMS and link communication through status lights and software.
Provides instructions and warnings for charging the AMS device battery.
Explains the Connection indicator colors (Green, Yellow, Red) and potential interference.
Steps to re-pair the AMS and link module if they are not communicating.
How to get on-screen warnings when a measured parameter strays from its limits.
How to download real-time data to a log file when a parameter strays beyond limits.
How to keep track of AMS runs for record-keeping and quality control.
Instructions on typing text into Operator, Tool, Station, and Comment fields.
Explains how the Go/No-Go feature monitors traces for excessive vibration levels.
Detailed steps for setting Go/No-Go tolerances in the MultiView software.
Instructions for starting, pausing, and finishing manual trace recording.
Explains how triggers and Go/No-Go events initiate and extend auto-recording.
Steps to record data using Go/No-Go tolerances and set related options.
How to import AMS log files into applications like MATLAB or Excel.
How to configure MultiView to record comma-delimited (CSV) files.
Steps to set up filters (low-pass, high-pass, band-pass) to remove unwanted signal parts.
Steps to select the time-domain format and absolute value option.
How to display frequency-domain data using Fast Fourier Transform (FFT).
Instructions on how to start MultiReview and open log files.
How to use playback controls like forward, reverse, pause, and speed.
How to find, add, edit, and delete marks within log files.
How to review traces, compare files, and analyze narrow peaks in log files.
How to compile peak-acceleration, peak-excursion, and time-domain reports.
Steps to start MultiReview and open a log file.
Description of playback controls for moving through log files.
How to use division jumps, slider, and speed control for playback.
How to compile reports showing peak acceleration data for log files.
Steps to set display units and conventions for horizontal inclination.
Steps to change the Go/No-Go tolerance value for leveling.
Warning about improper zero-point calibration and steps to perform field calibration.
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