DISCO DAD321 - Page 17

Contents-7
CONTENTS
2-4. Replacing the Solenoid Valve......................................................................H-32
2-4-1. Removing the machine outer cover....................................................H-33
2-4-2. Replacing the solenoid valve..............................................................H-35
2-4-3. Completion of replacing the solenoid valve........................................H-37
3. Consumables to Be Replaced at 1000-Day
(Recommended) Intervals..................................................................H-38
3-1. Replacing the Chuck Table Waterproof Cover
/Chuck Table O-ring/Bellows ........................................................................H-39
3-1-1. Removing the chuck table..................................................................H-40
3-1-2. Replacing the waterproof cover/O-ring/bellows..................................H-41
3-1-3. Completion of replacing the waterproof cover/ O-ring/bellows...........H-44
3-2. Replacing the Chuck Table Center Ring......................................................H-45
I. DATA SHEET.......................................................I-1
1. Noise Level ........................................................................................... I-2
CHECK SHEET 1 - MAINTENANCE
AND REGULAR INSPECTION -..........Appendix-1
CHECK SHEET 2 - CONSUMABLE
PARTS REPLACEMENT - ...................Appendix-2
INDEX ...............................................................Index-1
ADDRESS LIST
IN AN EVENT OF AN ACCIDENT
Sample