Estun Summa Series - SEMI F47 Function

Summa Series Servodrive Product Manual
Application Functions
Document Version: V1.01
(Dec, 2019)
© 2019 ESTUN Automation Co., Ltd. All right reserved.
7-19
7.11 SEMI F47 Function
The SEMI F47 function detects an A.D1warning (Undervoltage Warning) and limits the output current if
the DC main circuit power supply voltage to the Drive drops to a specified value or lower because the
power was momentarily interrupted or the main circuit power supply voltage was temporarily reduced.
This function complies with the SEMI F47 standards for semiconductor manufacturing equipment.
You can combine this function with the Momentary Power Interruption Hold Time (Pn538) to allow the
Motor to continue operating without stopping for an alarm or without recovery work even if the power
supply voltage drops.
You can set Pn007.2=1 for slow down the ramp rate of the bus voltage when an undervoltage occurs,
allowing the system to run longer. In addition, you can set the Torque Limit at Main Circuit Voltage Drop
(Pn407), which is a relative percentage of Pn401 (Forward Internal Torque Limit) or Pn402 (Reverse
Internal Torque Limit).
The Drive controls the torque limit for the set time (Pn407) after the Undervoltage warning is cleared.
Main circuit power interruption time
Pn407
The main circuit bus voltage
increases when the main circuit
power supply recovers.
The output torque is limited to suppress
the drop in the main circuit bus voltage.
0%
Pn406
Torque limit starts.
Threshold
Main circuit
bus voltage
Main circuit input
power supply
Undervoltage
warning (D1)
Torque limit
reference
Parameter
Name
Range
Unit
Default
When Enabled
Pn538
Momentary Power Interruption
Hold Time
0 to 50
1 cycle
1
Immediately
Pn406
Torque Limit at Main Circuit
Voltage Drop
0 to 100
%
50
Immediately
Pn407
Release Time for Torque Limit
at Main Circuit Voltage Drop
0 to 1000
ms
100
Immediately
IMPORTANT

This function handles momentary power interruptions for the voltage and time
ranges stipulated in SEMI F47. An uninterruptible power supply (UPS) is required as
a backup for momentary power interruptions that exceed these voltage and time
ranges.

Set the host controller or Drive torque limit so that a torque reference that exceeds
the specified acceleration torque will not be output when the power supply for the
main circuit is restored.

For a vertical axis, do not limit the torque to a value that is lower than the holding
torque.

This function limits torque within the range of the Drive’s capability for power
interruptions. It is not intended for use under all load and operating conditions. Set
the parameters while monitoring operation on the actual machine.

You can set the momentary power interruption hold time to increase the amount of
time from when the power supply is turned OFF until power supply to the Motor is
stopped. To stop the power supply to the Motor immediately, use the Servo OFF
command.