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HELIX CTI-CRYOGENICS On-Board FastRegen User Manual

HELIX CTI-CRYOGENICS On-Board FastRegen
108 pages
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HELIX TECHNOLOGY CORPORATION
Mansfield Corporate Center, Nine Hampshire Street, Mansfield, Massachusetts 02048-9171 Telephone (508) 337-5000
C
HELIX TECHNOLOGY CORPORATION
-
TI C
RY
OG
EN
ICS
On-Board
®
FastRegen
Control Module
Programming and Operation Instructions
8040406
Rev. C (7/97)

Table of Contents

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HELIX CTI-CRYOGENICS On-Board FastRegen Specifications

General IconGeneral
BrandHELIX
ModelCTI-CRYOGENICS On-Board FastRegen
CategoryControl Unit
LanguageEnglish

Summary

Basic On-Board Module Information

Microprocessor Control System

Explains the module's core control architecture.

Remote Operation Options

Details capabilities for remote control.

Keypad/Display Interface

Display Components

Describes alphanumeric display and scroll keys.

Keypad/Display Functions

Navigation and Input Keys

Explains scroll, clear, enter, and function keys.

On-line Help Feature

Provides context-sensitive assistance.

Software Version Identification

System Power Operations

Pre-Operation Checks

Ensures proper setup before starting.

Starting the Cryopump

Procedure for powering on the cryopump.

Shutting Down the Cryopump

Procedure for safely powering off the cryopump.

Programming and Operation

Normal Operation and Monitoring

Covers standard operation and the MONITOR function.

MONITOR Function: Status Display

Cryopump ON/OFF and Stage Temperature

Shows cryopump status and second stage temp.

Stage Temperatures and Auxiliary Pressure

Displays stage temperatures and auxiliary pressure.

MONITOR Function: Temperature Details

First Stage Temperature

Displays the first stage temperature in Kelvin.

Second Stage Temperature

Displays the second stage temperature in Kelvin.

MONITOR Function: Gauge Pressure Details

Auxiliary Thermocouple Gauge Pressure

Displays auxiliary TC gauge pressure.

Cryo Thermocouple Gauge Pressure

Displays cryopump TC gauge pressure.

MONITOR Function: Relay Status

Relay 1 Control Status

Shows Relay 1 ON/OFF and Auto/Manual mode.

Relay 2 Control Status

Shows Relay 2 ON/OFF and Auto/Manual mode.

MONITOR Function Operation Guide

Regeneration Function Overview

REGEN Function Parameters

REGEN Parameter Configuration: ON/OFF & Delay Start

REGEN ON/OFF Configuration

Sets the regeneration cycle status.

Delay Start Configuration

Allows delaying the start of a regeneration cycle.

REGEN Parameter Configuration: Restart & Rough Test

Delay Restart Configuration

Sets delay before full regeneration restart.

Fast Rough Test Configuration

Sets fast rough test time for Argon elimination.

REGEN Parameter Configuration: Purge & Repurge

Extended Purge Configuration

Extends purge time during Full regeneration.

Repurge Configuration

Sets repurge time if roughing pressure fails.

REGEN Parameter Configuration: Cycles & Base Pressure

Repurge Cycles Configuration

Sets number of repurge cycles if base pressure not met.

Base Pressure Configuration

Establishes target base pressure for roughing.

REGEN Parameter Configuration: Rate-of-Rise

Rate-of-Rise (ROR) Configuration

Sets the micron/minute rate for ROR test.

ROR Cycles Configuration

Sets max ROR cycles before abortion.

REGEN Parameter Configuration: Interlock & Power Failure

Rough Valve Interlock Configuration

Controls rough valve operation independent of grouping.

Power Fail Recovery Configuration

Configures behavior after power loss.

REGEN Parameter Configuration: Power Fail Recovery Temperature

REGEN Function Programming Procedures

Initiate Regeneration Cycle

Steps to start a regeneration cycle.

Abort Regeneration Cycle

Steps to abort an active regeneration cycle.

Program Delay Start

Procedure to program delay start for regeneration.

REGEN Programming Procedures: Restart & Rough Test

Program Delay Restart

Procedure to program delay restart time.

Program Fast Rough Test

Procedure to program fast rough test time.

REGEN Programming Procedures: Purge & Repurge

Program Extended Purge

Procedure to program extended purge time.

Program Repurge

Procedure to program repurge time.

Program Repurge Cycles

Procedure to program repurge cycles.

REGEN Programming Procedures: Base Pressure & ROR

Program Base Pressure

Procedure to program base pressure.

Program Rate-of-Rise (ROR)

Procedure to program ROR value.

REGEN Programming Procedures: ROR Cycles & Interlock

Program ROR Cycles

Procedure to program ROR cycles.

Program Rough Valve Interlock

Procedure to program rough valve interlock.

REGEN Programming Procedures: Power Failure

Program Power Failure Recovery

Procedure to set power failure recovery mode.

Program Power Failure Recovery Temperature

Procedure to set power fail recovery temperature.

Performing Regeneration Cycles

Execute Fast Regeneration Cycle

Steps to execute a fast regeneration.

Execute Full Regeneration Cycle

Steps to execute a full regeneration.

SERVICE Function Overview

SERVICE Function Parameters: Identification

Serial Number and Software Version

Displays module serial number and software version.

SERVICE Function Parameters: Operational Data

Network Identification Number

Displays the network address of the cryopump.

Elapsed Pump Time

Displays total operating hours.

SERVICE Function Parameters: Regeneration History

Time Since Last Full Regeneration

Displays time since last full regeneration.

Time Since Last Fast Regeneration

Displays time since last fast regeneration.

SERVICE Function: Security Settings

Password Creation and Display

Allows creating or displaying a system password.

Lock Mode Operation

Prevents unauthorized access to functions.

SERVICE Function: Security and Calibration

Parameter Lock Operation

Prevents unauthorized modification of parameters.

Zero Auxiliary Thermocouple Calibration

Resets the auxiliary thermocouple gauge to zero.

SERVICE Function: Calibration and Control

Zero Cryo Thermocouple Calibration

Resets the cryo thermocouple gauge to zero.

First Stage Temperature Control

Enables or disables first stage temperature control.

SERVICE Function Operation Procedures

Serial Number and Software Version Display

Procedure to display SN and SW version.

Network Identification Number Display

Procedure to display Net ID.

Elapsed Pump Time Display

Procedure to display pump operating hours.

Time Since Last Full Regeneration Display

Procedure to display time since last full regen.

SERVICE Procedures: Time Tracking & Security

Time Since Last Fast Regeneration Display

Procedure to display time since last fast regen.

Password Procedure

Procedure to create or display a password.

Lock Mode Procedure

Procedure to enable/disable lock mode.

SERVICE Procedures: Security & Calibration

Parameter Lock Procedure

Procedure to enable/disable parameter lock.

Zero Auxiliary Thermocouple Procedure

Procedure to zero auxiliary thermocouple.

SERVICE Procedures: Calibration & Control

Zero Cryo Thermocouple Procedure

Procedure to zero cryo thermocouple.

First Stage Temperature Control Procedure

Procedure to control first stage temperature.

CONTROL Function Overview

CONTROL Function Parameters: Cryopump & Temperature

Cryopump ON/OFF and Second Stage Temperature

Turns cryopump ON/OFF and shows stage temp.

CONTROL Parameters: Gauge Control

Aux TC ON/OFF and TC Pressure

Turns Aux TC ON/OFF and shows pressure.

Cryo TC ON/OFF and TC Pressure

Turns Cryo TC ON/OFF and shows pressure.

CONTROL Parameter: Rough Valve Control

CONTROL Parameter: Purge Valve Control

CONTROL Parameters: Relay Control

Relay 1 ON/OFF and Auto/Manual Control

Controls Relay 1 ON/OFF and mode.

Relay 2 ON/OFF and Auto/Manual Control

Controls Relay 2 ON/OFF and mode.

CONTROL Function Operation Procedures

Aux TC ON/OFF and TC Pressure Procedure

Procedure to turn Aux TC ON/OFF.

Cryo TC ON/OFF and TC Pressure Procedure

Procedure to turn Cryo TC ON/OFF.

CONTROL Operation Procedures: Valves & Relay 1

Rough Valve Open/Closed Procedure

Procedure to open/close rough valve.

Purge Valve Open/Closed Procedure

Procedure to open/close purge valve.

CONTROL Operation Procedure: Relay 2

RELAYS Function Overview

RELAYS Function Parameters: Selection & State

Select Relay 1 or 2

Selects relay for programming.

Current Relay State (ON/OFF, Auto/Manual)

Displays current relay state and mode.

RELAYS Parameters: Automatic Control

Current Program for Automatic Control

Displays user-defined program for automatic relay control.

RELAYS Parameters: Temperature Limits

First Stage Temperature Limits

Sets upper/lower limits for first stage temperature.

Second Stage Temperature Limits

Sets upper/lower limits for second stage temperature.

RELAYS Parameters: Pressure Limits

Cryo Thermocouple Pressure Limits

Sets upper/lower limits for cryo TC pressure.

Auxiliary Thermocouple Pressure Limits

Sets upper/lower limits for aux TC pressure.

RELAYS Parameters: Cryopump & Regeneration

Cryopump Status Relay Programming

Programs relay for cryopump motor ON/OFF.

Regeneration Status Relay Programming

Programs relay for regeneration cycle status.

RELAYS Parameters: Valve & Time Delay

Roughing Valve Status Relay Programming

Programs relay for rough valve open/close.

Relay Activation Time Delay

Sets delay for relay activation/deactivation.

RELAYS Function Operation Procedures

Program First Stage Temperature Limits

Programs relay for first stage temp limits.

RELAYS Operation: Second Stage & Cryo TC

Program Second Stage Temperature Limits

Programs relay for second stage temp limits.

Program Cryo Thermocouple Pressure Limits

Programs relay for cryo TC pressure limits.

RELAYS Operation: Auxiliary TC & Cryopump

Program Auxiliary Thermocouple Pressure Limits

Programs relay for aux TC pressure limits.

Program Cryopump Operation Status

Programs relay for cryopump motor ON/OFF.

RELAYS Operation: Regeneration & Rough Valve

Program REGEN Track Status

Programs relay for regeneration cycle status.

Program Rough Valve Status

Programs relay for rough valve status.

RELAYS Operation: Time Delay

Program Time Delay

Programs relay to delay activation/deactivation.

Software Function Parameters Reference

Reference table for all software function parameters.

Table 3-5: Software Function Parameters

On-Board Module Replacement

Module Ordering Information

Information required for ordering replacement modules.

Module Replacement Procedure

Step-by-step guide for replacing the module.

Appendix B: RS-232 Interface Protocol Format

RS-232 Protocol Details

Checksum Algorithm and Message Traffic

Explains checksum calculation and command-response exchanges.

RS-232 Error Handling and Examples

Error Message Categories and Typical Exchange

Classifies errors and illustrates communication.

RS-232 Cable Connection Diagrams

RS-232 Commands Reference (A-O)

RS-232 Commands Reference (P)

RS-232 Commands Reference (Q)

RS-232 Commands Reference (S)

RS-232 Commands Reference (T)

RS-232 Commands Reference (V, W, Y, Z, @)

RS-232 Commands Reference (e, g, h, i, j)

RS-232 Commands Reference (k, l, m, n, r, s, t, u)

RS-232 Commands Reference (v, z, [B])

Appendix C: RS-232 Regeneration Responses

Regeneration Response Descriptions

Details specific REGEN response codes and meanings.

REGEN Responses Table (A-H)

REGEN Responses Table (I-L)

REGEN Responses Table (M-V)

REGEN Responses Table (W, X, Y, Z)

Appendix D: Power Failure Recovery Messages

Power Failure Recovery Messages Table

Lists power failure recovery messages and meanings.

Appendix E: Error Messages

Keypad/Display Error Messages Table

Lists keypad/display error messages and conditions.