Inficon Ecotec E3000 530-001 - Page 142

9-9 Annex
kina22e chapter 9.fm technical handbook(1206)
Xe Xenon 132.0 131.3 7.0E7
SF6 127.0 146.1 9.1E7
HT135 Galden HT135 100 610 1.2E7
117 497 7.0E7
119 497 7.0E7
69 497 7.0E7
135 497 7.0E7
ZT130 Galden ZT130 100 497 7.0E7
69 610 1.2E7
119 610 1.2E7
169 610 1.2E7
131 610 1.2E7
Gas designation
(max. 5 digits)
Other Designations Meas. mass
(xxx.x amu)
Molecule mass
(xx.x amu)
Normalisation factor
(Base value x.xEx)