Inficon Ecotec E3000 530-001 - How the Instrument Works; 2.1 Description of the Functions

How the Instrument Works 2-1
kina22e chapter 2.fm technical handbook(1206)
2 How the Instrument Works
2.1 Description of the Functions
The Ecotec E3000 is capable of detecting and quantifying the refrigerant sucked in
through the sniffer line by means of a selective mass spectrometer.
The Ecotec E3000 is composed of the following principal subassemblies:
• a quadrupole mass spectrometer as the detection system
• a high vacuum pump system
• an inlet system for the gas flow
• the corresponding electrical and electronic subassemblies for supplying power
and for signal conditioning.
The mass spectrometer only operates under high vacuum conditions, i.e. the
pressure in the mass spectrometer must always stay below 10
-4
mbar. This vacuum
is generated by the turbo molecular pump with the support of the diaphragm pump.
The pressure pV between the two pumps is measured with a piezo resistive
measuring system and this pressure lies in the range between 4 to 10 mbar while in
the measurement mode. This pressure must not exceed a value of 10 mbar as
otherwise the turbo molecular pump will not be capable of maintaining the vacuum
in the mass spectrometer.
Fig. 2-1 Vacuum Diagram of the Ecotec E3000
ECOTEC E3000
MVP 015
Transpector
TPD 021
Sniffer probe
external
particle
filter
internal
particle
filter
flow divider 1
flow divider 2
flow meter
flow
limiter 1
flow
limiter 2
pv
1
2