Inficon PSG550 - 2 Technical Data

10
tina60e1-a (2011-04)
2 Technical Data
For further technical data for gauges with serial inter-
faces →  [3], [4], [5].
Measurement principle thermal conductance acc. to
Pirani
Measurement range 5×10
-5
… 1000 mbar
Accuracy (N
2
)
5×10
-4
… 1×10
-3
mbar
±50% of reading
1×10
-3
… 100 mbar
±15% of reading
100 … 1000 mbar
±50% of reading
Resolution (at 1000 mbar)
±0.15% of reading
Repeatability (N
2
)
1×10
-3
… 100 mbar
±2% of reading
Output signal (measurement signal)
Voltage range
3PIx-0xx-xxx0 0 … +10 V
3PIx-0xx-xxx1 0 … +8.5 V
3PIx-0xx-xxx2 0 … +5.529 V
3PIx-0xx-xxx3 0 … +8.875 V
Measurement range
3PIx-0xx-xxx0 +0.61 … +10 V
3PIx-0xx-xxx1 +1.2 … +8.5 V
3PIx-0xx-xxx2 +0.375 … +5.529 V
3PIx-0xx-xxx3 +1.57 … +8.875 V
Error signal 0 … 0.05 V
Voltage vs. pressure
3PIx-0xx-xxx0 1.286 V/decade, logarithmic
3PIx-0xx-xxx1 1 V/decade, logarithmic
3PIx-0xx-xxx3 1 V/decade, logarithmic
3PIx-0xx-xxx2
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