Inficon UL1000 Fab - Table of Contents

Table of Contents 3
iina70e content.fm Technical Handbook(1408)
Table of Contents
1 General Information 7
1.1 Notes on the Use of this Handbook 7
1.1.1 Safety Symbols 7
1.1.2 Indications 8
1.1.3 Symbols of Vacuum Technology 8
1.1.4 Definiton of Terms 8
1.2 Support from INFICON Service 10
1.2.1 Service Centers 11
1.3 Introduction 13
1.3.1 Purpose 13
1.3.2 Technical Data 15
1.3.2.1 Physical Data 15
1.3.2.2 Electrical Data 15
1.3.2.3 Other Data 16
1.3.2.4 Ambient Conditions 16
1.4 Unpacking 16
1.4.1 Supplied Equipment 17
1.4.2 Accessories and Options 18
1.4.2.1 Sniffer line SL200 18
1.4.2.2 Toolbox 18
1.4.2.3 Helium Bottle Holder 18
1.4.2.4 ESD Mat 18
1.4.2.5 RC1000 Remote control 19
1.4.2.6 Test chamber TC1000 20
2 Installation 21
2.1 Transportation 21
2.2 Working Location 23
2.3 Electrical Connections 25
2.3.1 Mains Power 25
2.3.2 Connections for the Data Acquisition Systems 27
2.3.2.1 Accessories 28
2.3.2.2 Digital Out 28
2.3.2.3 Digital In 29
2.3.2.4 Recorder 30
2.3.2.5 RS232 31
2.3.2.6 Remote Control 31
2.4 Vaccum Connections 32
2.4.1 Inlet Port 32
2.4.2 Exhaust 32
2.4.3 Vent 32
2.4.4 Purge-connection (UL1000 Fab) /
Gas ballast (UL1000) 32
2.5 Default parameters 33