Inficon UL1000 Fab - Page 6

6 Table of Contents
iina70e content.fm Technical Handbook(1408)
7.2 The calibration routines 88
7.2.1 Internal Calibration 89
7.2.1.1 Automatic Internal Calibration 89
7.2.1.2 Manual Internal Calibration 89
7.2.2 External Calibration 89
7.3 Factor of Calibration - Range of Values 93
8 Error And Warning Messages 94
8.1 Hints 94
8.2 List of Errors & Warnings 95
9 Maintenance Work 99
9.1 General Information 99
9.2 Maintenance or Service at INFICON 100
9.3 Key to the Maintenance Plan 100
9.4 Maintenance Plan 101
9.5 Maintenance Groups 102
9.5.1 1500 Hours Maintenance 102
9.5.2 4000 Hours Maintenance 102
9.5.3 8000 Hours Maintenance 103
9.5.4 16000 Hours Maintenance 103
9.5.5 Notes refering the maintenance of the SplitFlow 80 104
9.6 Description of the Maintenance Work 104
9.6.1 Opening the Instrument for Maintenance Purposes 105
9.7 Checking and Replacing the Filter Insert 106
9.8 Replacing the Exhaust Silencer 108
9.9 Checking/Emptying the Exhaust Filter 109
9.9.1 Replacing the Filter Insert 109
9.10 Monitoring the Oil Level of the D16 B and Topping up the Oil 111
9.11 Oil Change for the D16B 112
9.12 Scroll Pumps (UL1000 and UL1000 Fab only) 114
Appendix 115
A Diagram 115
B Index 116
C Declaration of Conformity 118