Inficon UL3000 Fab ULTRA - Page 114

8 | Cleaning and maintenance INFICON
114 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
4
Loosen the screws, which fix the filter mat on the metal sheet.
5
Replace the filter mat.
6
Secure the filter mat with the screws, insert the metal sheet and fix it with the
knurled screw.