Inficon UL3000 Fab ULTRA - 8.8 Maintenance plan

8 | Cleaning and maintenance INFICON
120 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
8.8 Maintenance plan
Assembly Maintenance work Operating hours / years Service
level
Spare part
number
1500 4000 8000 16000 24000
1/4 1 2 3 4
Vacuum system
Forevacuum
pump NeoDry
Check performance X X X X II
Replace pump if
necessary
X
3
X
3
X X
3
III 200009420
200009420R
TMP SplitFlow
80
Changing the oil wick
cartridge
X
3
II 200003801
Change bearings and
replace oil wick cartridge
X
2
III
Valve block Clean valves X
3
X X X III
Replace valve seals X
3
X X X III 200007630
Dismantle and clean the
valve block
X
3
X X
3
III
Flood and
purge gas line
Renew filter X
3
X
1
X
1
X
1
II 200000683
200001095
Electrical
Fan
subassemblies
Blow out fan chassis and
TMP
X
3
X
1
X
1
X
1
X
1
II
Check air filter kit and
replace if necessary
X
3
X
1
X
1
X
1
X
1
I 200007656
Subassemblies and accessories
Sniffer line
SL3000
Renew filter X
3
- Perform sniffer operation every
1000 hours
I 200001116
20003500
Calibration
leak
Recalibration /
replacement
X
2
- Perform depending on the expiration
date
III 14030
Maintenance schedule
legend
• I Customer or higher level
• II Customer with instruction or higher level
• III INFICON Service Technician
• X Carry out maintenance as per operating hours or duration
• X
1
Maintenance after operating hours, not after duration
• X
2
Maintenance by duration, not by operating hours
• X
3
Dependent on environmental influences, operating conditions, contamination
and application process