Inficon UL3000 Fab ULTRA - 10.3 Bus module

INFICON Accessories and interfaces | 10
UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) 133 / 152
Function State: Description
Setpoint 3 closed: Measured leak rate exceeds the setpoint 3
open: Measured leak rate undercuts the setpoint 3
Setpoint 4 closed: Measured leak rate exceeds the setpoint 4
open: Measured leak rate undercuts the setpoint 4
Purge closed: Purge valve open
open: Purge valve closed
Vent closed: Internal vent valve open.
open: Internal vent valve closed
Standby or evacuate closed: State standby or evacuate active
open: State standby of evacuate not active, such
as when measuring
Status calibration
leak valve
closed: Calibration leak valve is open
open: Calibration leak valve closed
Warning closed: Warning
open: No warning
ZERO active closed: ZERO switched on
open: ZERO switched off
10.2.5 Setting up the I/O module protocol
To switch between ASCII and LD protocol.
ü
Supervisor
rights
1
> Setup > Accessories > I/O module > I/O module protocol
2
Adjust.
3
Save .
10.3 Bus module
On the USB stick enclosed with the device and the bus module BM1000 you will find
further files on the subject of bus modules. This also includes the GSD file for
PROFIBUS, which is located in the “..\Manuals\Interface Description“ folder.
For the different bus modules from INFICON see also “Accessories and spare parts
[}124]“.