Inficon UL3000 Fab ULTRA - Vacuum Connections; Inlet

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UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) 29 / 152

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See also "Overview of Rights Groups [}52]".

4.3.3 Vacuum connections

4.3.3.1 Inlet

The inlet is located on the upper part of the device. This is a DN 25 KF flange.

If you select the vacuum leak test mode, connect the test object or the vacuum

chamber to the flange.

If you are testing applications with dust or dirt, use the O-ring with filter, see "Scope of

delivery, Transport, Storage”. In this case, the pump down times are extended.

Use this inlet also for the connection of the SL200 sniffer line or the test chamber

TC1000.