Inficon UL3000 Fab ULTRA - Page 5

INFICON Table of Contents
UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) v
6.3.5.1 Consider the background of the test chamber ...................................................................69
6.3.6 HYDRO•S ...................................................................................................................................69
6.3.6.1 Set HYDRO•S ....................................................................................................................69
6.3.6.2 Use HYDRO•S ...................................................................................................................70
6.3.7 Setting the machine factor .......................................................................................................... 70
6.3.8 Set external calibration leak........................................................................................................ 71
6.3.9 Change pressure limits ............................................................................................................... 71
6.3.10 Set and use the function ZERO .................................................................................................. 72
6.3.11 Vent, purge, regenerate..............................................................................................................73
6.3.12 Change leak rate filter.................................................................................................................75
6.3.13 Change background suppression ............................................................................................... 75
6.3.13.1 Determine the background of the inlet area .......................................................................76
6.3.14 Change SL3000 settings for sound / light...................................................................................76
6.3.15 Change the sniffer line pressure monitoring ............................................................................... 77
6.3.16 Calibrating...................................................................................................................................77
6.3.16.1 Internal calibration..............................................................................................................78
6.3.16.2 External calibration.............................................................................................................78
6.3.16.3 Check calibration................................................................................................................78
6.3.16.4 Measure internal calibration leak .......................................................................................79
6.4 Measuring ...............................................................................................................................................80
6.5 Measuring helium ambient concentration ...............................................................................................81
6.6 Measurement data..................................................................................................................................81
6.6.1 Switch on data recording and configure export........................................................................... 81
6.6.2 Display measurement cycles ...................................................................................................... 82
6.6.3 Export measurement data via network ....................................................................................... 83
6.6.4 Measurement data database: Information .................................................................................. 84
6.7 Information..............................................................................................................................................85
6.7.1 Call the latest information to the current measurement value..................................................... 85
6.7.2 Call the latest information to the current calibration value .......................................................... 85
6.7.3 Information on connected accessories ....................................................................................... 85
6.7.4 Retrieve information about the device ........................................................................................ 86
6.7.5 Call information on the assemblies.............................................................................................86
6.7.6 Call the energy data information.................................................................................................86
6.7.7 Call information on the HYDRO•S ..............................................................................................87
6.7.8 Call information on the SL3000 Sniffer line................................................................................. 87
6.8 Log..........................................................................................................................................................87
6.8.1 Call the error and warning log..................................................................................................... 87