Inficon UL3000 Fab ULTRA - Result Display of the Auto Leak Test; Change Units

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ð The internal background is created from the remaining gas, which has not yet
been pumped out. Very clean systems show a background in the range of 1 x
10
-11
mbar l/s. Under normal conditions there is a background of 1 x 10
-10
mbar l/s or 1x10
-9
mbar l/s. For the mathematical treatment of the internal
background, see "Change background suppression [}75]”.
4
Save .
6.2.7 Result display of the Auto Leak Test
1
3
2
5
4
7
6
Supervisor
1 "Passed" or "Failed" as the result of the last test under "Part number". Test
failed if the leak rate exceeds the setpoint.
2 Actual test time, within set limits, see “Set Auto Leak Test [}68]“
3 Part number, assigned with "Part numbering". Starting from a starting number,
the part numbers are automatically incremented, see “Set Auto Leak Test
[}68]“.
4 Failed tests in sequence are incremented to warning limit. After a passed test,
the defect count is reset to 0, see “Set Auto Leak Test [}68]”.
5 Auto Leak Test pause: When the test chamber is closed, you can interrupt the
measurements by pressing this button and confirming in the following window.
The test chamber remains in the pumped-down state.
6 Measurement result
7 Operation mode “Auto Leak Test” active, see “Select operation mode [}67]”
6.2.8 Change units
For the vacuum operation mode you can select between "Torr·l/s", "atm·cc/s", "Pa·m
3
/
s", and "mbar·l/s".