Inficon UL3000 Fab ULTRA - Consider the Background of the Test Chamber; Hydro•S; Set HYDRO•S

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6.3.5.1 Consider the background of the test chamber
If unexpected results, such as many failed tests are displayed in succession, we
recommend performing a "Reference measurement". You can repeat such a
measurement at regular intervals.
ü Test chamber is mounted, empty and closed.
ü Operation mode “Auto Leak Test“
ü Device is in the "Standby" state.
1
Select the cross-hair icon .
2
Select "Reference measurement".
3
Press .
ð The chamber is evacuated 3 times and vented.
ð After cleansing, the current helium background is measured.
ð The new values of the measured background are automatically stored and
subtracted from the results of future measurements.
6.3.6 HYDRO•S
If you are testing large test objects during vacuum operation, you can reduce the time
to ready for measurement by using HYDRO•S, see also Operation mode
"Vacuum" [}18].
6.3.6.1 Set HYDRO•S
In addition to the basic setting described here, the availability of HYDRO•S depends
on additional requirements, such as the selected operation mode and the operating
state, see “Use HYDRO•S [}70]”.
ü
Supervisor
rights
1
> Setup > Measurement > HYDRO•S
2
Make a selection from:
"Deactivated" (factory setting) if you do not use HYDRO•S and also want to
dispense with manual switchability.
"Manual" if you want to activate or deactivate HYDRO•S by pressing on the
measurement screen. See also "Assembly of the touchscreen [}27]".
"Automatic" if you want to use HYDRO•S as much as possible.
3
Save .
4
After setting HYDRO•S to “Manual” or “Automatic” perform a calibration, see
“Calibrating [}77]”.