Inficon UL3000 Fab ULTRA - Internal Calibration; External Calibration; Check Calibration

6 | Operation INFICON
78 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
► When using hydrogen or helium-3 (
3
He) as tracer gas an internal calibration is not
possible. In this case, use an external calibration leak.
► The operation modes "Vacuum" and "Sniffing" must be separately calibrated when
using an external calibration.
► A calibration should only take place when the device is at operating temperature.
Calibrate at least 20 minutes after switch-on.
► For systems with a greater distance to the test object, we recommend the use of an
external calibration leak at the location of the test object.
► When using the internal calibration leak, observe the setting of the machine factor,
see also “Setting the machine factor [}70]“.
6.3.16.1 Internal calibration
ü User rights
ü The device is in the state "Standby" or "Measure".
1
Select the cross-hair icon .
2
Select the calibration “Internal”.
3
Press .
ð The device performs an internal calibration.
6.3.16.2 External calibration
ü
Operator
or
Supervisor
rights
1
Mount the calibration leak on the inlet of the device.
2
> Setup > Measurement > Calibration leak
3
Adjust the leak rate of the calibration leak used, see also “Set external
calibration leak [}71]”.
4
Place the device in the state "Standby" or "Measure".
5
Press the cross-hair icon .
6
Select the calibration “External”.
7
Press .
8
Follow the instructions on the screen.
6.3.16.3 Check calibration
The calibration can also be checked without changing calibration factor. This tells you
whether a new calibration is necessary.
ü User rights
ü The device is in "Standby" or "Measure" mode.