Inficon UL3000 Fab ULTRA - Measure Internal Calibration Leak

INFICON Operation | 6
UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) 79 / 152
1
Select the cross-hair icon .
2
Select “Proof“.
ð The check is started and the calibration factor is recalculated.
ð The newly calculated calibration factor is displayed.
ð If the newly calculated calibration factor deviates considerably from the stored
calibration factor, a prompt for new calibration is displayed.
6.3.16.4 Measure internal calibration leak
ü User rights
ü The device is in "Standby" or "Measure" mode.
1
Select the cross-hair icon .
2
Select "Measure internal calibration leak".
3
Press .
ð The calibration leak is opened, the measured leak rate is displayed and
compared with the target value.
Matching of the measured value of the internal calibration leak and the default value of
the internal calibration leak does not mean that the measuring system is absolutely
accurate if the internal calibration leak was used for calibrating the leak detector. See
also "Setting the machine factor [}70]".