Inficon UL3000 Fab ULTRA - Retrieve Information about the Device; Call Information on the Assemblies; Call the Energy Data Information

6 | Operation INFICON
86 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
►
> Accessories > Bus module
ð If a bus module is connected, you will find details.
6.7.4 Retrieve information about the device
Diverse information on the device is shown: Software and serial numbers, network
information and operating hours.
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> Device > Identification
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> Device > Network
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> Device > Operating hours
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> Device > MSB
6.7.5 Call information on the assemblies
Diverse measurement values and information to the following assemblies is shown:
Preamplifier, ion source, turbo molecular pump (TMP), processor assembly MSB,
backing pump and its frequency converter.
►
> Assemblies > Preamplifier
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> Assemblies > Ion source
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> Assemblies > TMP
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> Assemblies > Backing pump
6.7.6 Call the energy data information
Various measured supply voltages and electrical powers are displayed.
►
> Energy > Voltage (1)
ð In this window the first part of the information to the voltage is shown.
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> Energy > Voltage (2)
ð In this window the second part of the information to the voltage is shown.