Inficon UL3000 Fab ULTRA - 6.12 View vacuum diagram

6 | Operation INFICON
92 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
6.11.1 Switch back to the internal monitor
NOTICE
Disconnect external monitor
► If the device is turned on, switch to the internal monitor in the menu before
disconnecting the connections of an external monitor.
When the instrument is switched on, you will be able to switch to internal monitor at
any time.
1
> Display > Switch monitor
2
Press the "Internal Monitor" button.
6.12 View vacuum diagram
To check the function and the operating state of the measuring system at a glance,
call up the simplified diagram of the vacuum diagram.
►
> Vacuum diagram
V10
V9
V8
V7
V5
V4c
V4b
V4a
V3
V2b
V2a
V1a
V1
p4
p2
p1
MS
TL
2
3
4
7
8
6
9
10
1
5
Fig.14: The most important components of the vacuum diagram in UL3000 Fab ULTRA devices
1 Inlet flange 6 Fore-vacuum pressure gauge
2 Inlet pressure gauge 7 Pressure measuring point for flow
monitoring
3 Internal calibration leak 8 Sniffer line