6 | Operation INFICON
94 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
6.15 Switching off the device
NOTICE
Turbo molecular pump can be damaged
The running turbo molecular pump can be damaged by jerky movements or foreign
objects.
► Avoid any jerking movements or vibrations to the device during operation and for up
to 2 minutes after switching off.
► Prevent foreign objects from entering the inlet of the device.
You can switch off the device with the power supply switch at any time. The
parameters set in the device remain saved.
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