12 tinb29e1-c (2019-10) VGC083A_B.om
When using the BAG055 Mini IG use a power source of 20 … 28 V (dc), 36 W or
use INFIOCN series optional power supplies.
Turn off power to the unit before attempting to service the controller.
Turn off power to the unit if a cable or plug is damaged or the product is not operat-
ing normally according to this instruction manual. Contact qualified INFICON ser-
vice personnel for any service or troubleshooting condition that may not be covered
by this operating manual.
It is important that the product be periodically inspected for sound electrical con-
nections and equipment grounding. Do not use if the equipment grounding or
electrical insulation has been compromised.
Do not use if the unit has been dropped or the enclosure has been damaged.
Contact INFICON for return authorization and instructions for returning the product
to INFICON for evaluation.
When using the BAG050 / 051 / 052 / 053 if measured pressure exceeds the
thresholds that are defined under the following conditions, the ion gauge will turn
off:
• The pressure exceeds 1.00 × 10
-3
Torr at 100 μA emission current.
• The pressure exceeds 5.00 × 10
-4
Torr at 4 mA emission current.
• The pressure exceeds 1.00 × 10
-4
Torr at 10 mA emission current.
When using the BAG055 Mini IG if measured pressure exceeds the thresholds that
are defined under the following conditions, the ion gauge will turn off:
• The pressure exceeds 5.00 × 10
-2
Torr at 100 μA emission current.
• The pressure exceeds 1.00 × 10
-3
Torr at 4 mA emission current.
During the Degas cycle, if the measured pressure exceeds 1.00 × 10
-4
Torr when
using the BAG050 / 051 / 052 / 053, or if the measured pressure exceeds
4.00 × 10
-3
Torr when using the BAG055, Degas will turn off but the filament will
remain turned on.
Ensure vacuum level is less than 5.00 x 10
-5
Torr before attempting to initiate
Degas of the BAG05x series ionization gauge heads.
Do not attempt to turn the IG on if the pressure is near the threshold limits defined
here.
Never use an auxiliary or convection gauge to automatically turn off the Ion Gauge
when the Ion Gauge filament in use is constructed of tungsten. The response time
of other gauges may not allow for timely turn off of the tungsten filament possibly
leading to filament damage. Always turn off the IG filament (tungsten) manually
before pressure is allowed to rise above 1.00E-03 (1.00 × 10
-3
) Torr.
If you are using dual filament IGs, it is highly recommended to periodically alternate
operating the ion gauge filaments 1 and 2. An inactive filament not operating for an
extended period of time may result in failure of that filament to establish and main-
tain emission current in applications where the filament coating may become conta-
minated by residual application or process related chemistries.
The most common cause of all vacuum gauge failures is contamination of the sen-
sor or head electrodes. Noisy or erratic readings and total gauge head failures are
all possible indications of gauge contamination. Contamination can generally be
characterized as either: A) a chemical reaction of process gases with head / sensor
electrodes, or B) an accumulation of material on the head (sensor) electrodes.
Sensors that fail due to contamination are not covered under warranty.
After servicing these products, ensure that all safety checks are made by a quali-
fied service person
To Next Page
Loading...
