Inficon VGC083A - Page 60

60 tinb29e1-c (2019-10) VGC083A_B.om
Pressure
[Torr]
Voltage
[V]
Pressure
[Torr]
Voltage
[V]
Pressure
[Torr]
Voltage
[V]
0.000
0.3751
1.00E-01
0.8780
2.00E+02
5.0190
1.00E-04
0.3759
2.00E-01
1.1552
3.00E+02
5.1111
2.00E-04
0.3768
5.00E-01
1.6833
4.00E+02
5.2236
5.00E-04
0.3795
1.00E+00
2.2168
5.00E+02
5.3294
1.00E-03
0.3840
2.00E+00
2.8418
6.00E+02
5.4194
2.00E-03
0.3927
5.00E+00
3.6753
7.00E+02
5.4949
5.00E-03
0.4174
1.00E+01
4.2056
7.60E+02
5.5340
1.00E-02
0.4555
2.00E+01
4.5766
8.00E+02
5.5581
2.00E-02
0.5226
5.00E+01
4.8464
9.00E+02
5.6141
5.00E-02
0.6819
1.00E+02
4.9449
1.00E+03
5.6593
Note - An analog output of above +11 volts indicates a faulty convection
gauge or unplugged gauge cable.
The equations and coefficients for the nth order polynomial equation defined for
various pressure measurement ranges for the Non-linear analog output (S-curve)
for CG1 or CG2 for N
2
/air described above are given in the following table:
For 0 mTorr to about 2 Torr, the Non-Linear Analog Output voltage range of
0.375 to 2.842 volts, use this table.
Coefficients for y(x) = a + bx + cx
2
+ dx
3
+ ex
4
+fx
5
a
-0.02585
b
0.03767
c
0.04563
d
0.1151
e
-0.04158
f
0.008738
For 2 Torr to about 100 Torr, the Non-Linear Analog Output voltage range of
2.842 to 4.945 volts, use this table.
Coefficients for 
(

)
=
++
2
1++
2
+
3
a
0.1031
b
-0.3986
c
-0.02322
d
0.07438
e
0.07229
f
-0.006866
For 100 Torr to 1000 Torr, the Non-Linear Analog Output voltage range of 4.94 to
5.659 volts, use this table.
Coefficients for 
(

)
=
+
1++
2
a
100.624
b
-0.37679
c
-20.5623
d
0.0348656
Where y(x) = pressure in Torr, x= measured analog output in volts
Example: Measured analog output voltage is 0.3840 V.
From first table shown above use equation:
y(x) = a + bx + cx
2
+ dx
3
+ ex
4
+fx
5
x = 0.3840 volts
a = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738
y(x) = Pressure = 1.0E-03 Torr