Inficon VGC083A - Page 65

tinb29e1-c (2019-10) VGC083A_B.om 65
The table below shows the convection gauge displayed readings at various
pressures for several commonly used gas types:
True
Pressure
(Torr)
N
2
Ar He O
2
CO
2
Kr Freon12 Freon22 D
2
Ne CH
4
1.00E-4
1.00E-4
1.00E-4
1.00E-4
1.00E-4
1.00E-4
1.00E-4
1.00E-4
1.00E-4
1.00E-4
1.00E-4
1.00E-4
2.00E-4
2.00E-4
2.00E-4
2.00E-4
2.00E-4
2.00E-4
2.00E-4
2.00E-4
2.00E-4
2.00E-4
2.00E-4
2.00E-4
5.00E-4
5.00E-4
5.00E-4
5.00E-4
5.00E-4
5.00E-4
3.00E-4
5.00E-4
5.00E-4
5.00E-4
5.00E-4
5.00E-4
1.00E-3
1.00E-3
7.00E-4
8.00E-4
1.00E-3
1.10E-3
4.00E-4
1.50E-3
1.50E-3
1.30E-3
7.00E-4
1.70E-3
2.00E-3
2.00E-3
1.40E-3
1.60E-3
2.00E-3
2.30E-3
1.00E-3
3.10E-3
3.10E-3
2.40E-3
1.50E-3
3.30E-3
5.00E-3
5.00E-3
3.30E-3
4.00E-3
5.00E-3
4.40E-3
2.30E-3
7.60E-3
7.00E-3
6.00E-3
3.50E-3
7.70E-3
1.00E-2
1.00E-2
6.60E-3
8.10E-3
9.70E-3
1.10E-2
4.80E-3
1.47E-2
1.35E-2
1.21E-2
7.10E-3
1.53E-2
2.00E-2
2.00E-2
1.31E-2
1.61E-2
1.98E-2
2.22E-2
9.50E-3
2.99E-2
2.72E-2
2.43E-2
1.41E-2
3.04E-2
5.00E-2
5.00E-2
3.24E-2
4.05E-2
4.92E-2
5.49E-2
2.35E-2
7.25E-2
6.90E-2
6.00E-2
3.48E-2
7.72E-2
1.00E-1
1.00E-1
6.43E-2
8.20E-2
9.72E-2
1.07E-1
4.68E-2
1.43E-1
1.36E-1
1.21E-1
7.00E-2
1.59E-1
2.00E-1
2.00E-1
1.26E-1
1.65E-1
1.94E-1
2.10E-1
9.11E-2
2.75E-1
2.62E-1
2.50E-1
1.41E-1
3.15E-1
5.00E-1
5.00E-1
3.12E-1
4.35E-1
4.86E-1
4.89E-1
2.17E-1
6.11E-1
5.94E-1
6.87E-1
3.59E-1
7.81E-1
1.00E+0
1.00E+0
6.00E-1
9.40E-1
9.70E-1
9.50E-1
4.00E-1
1.05E+0
1.04E+0
1.55E+0
7.45E-1
1.60E+0
2.00E+0
2.00E+0
1.14E+0
2.22E+0
1.94E+0
1.71E+0
7.00E-1
1.62E+0
1.66E+0
4.13E+0
1.59E+0
3.33E+0
5.00E+0
5.00E+0
2.45E+0
1.35E+1
4.98E+0
3.34E+0
1.28E+0
2.45E+0
2.62E+0
2.46E+2
5.24E+0
7.53E+0
1.00E+1
1.00E+1
4.00E+0
OP
1.03E+1
4.97E+0
1.78E+0
2.96E+0
3.39E+0
OP
2.15E+1
2.79E+1
2.00E+1
2.00E+1
5.80E+0
OP
2.23E+1
6.59E+0
2.29E+0
3.32E+0
3.72E+0
OP
5.84E+2
3.55E+2
5.00E+1
5.00E+1
7.85E+0
OP
7.76E+1
8.22E+0
2.57E+0
3.79E+0
4.14E+0
OP
OP
8.42E+2
1.00E+2
1.00E+2
8.83E+0
OP
2.09E+2
9.25E+0
2.74E+0
4.68E+0
4.91E+0
OP
OP
OP
2.00E+2
2.00E+2
9.79E+0
OP
2.95E+2
1.23E+1
3.32E+0
5.99E+0
6.42E+0
OP
OP
OP
3.00E+2
3.00E+2
1.13E+1
OP
3.80E+2
1.69E+1
3.59E+0
6.89E+0
7.52E+0
OP
OP
OP
4.00E+2
4.00E+2
1.35E+1
OP
4.85E+2
2.24E+1
3.94E+0
7.63E+0
8.42E+0
OP
OP
OP
5.00E+2
5.00E+2
1.61E+1
OP
6.04E+2
2.87E+1
4.21E+0
8.28E+0
9.21E+0
OP
OP
OP
6.00E+2
6.00E+2
1.88E+1
OP
7.30E+2
3.64E+1
4.44E+0
8.86E+0
9.95E+0
OP
OP
OP
7.00E+2
7.00E+2
2.18E+1
OP
8.59E+2
4.61E+1
4.65E+0
9.42E+0
1.07E+1
OP
OP
OP
7.60E+2
7.60E+2
2.37E+1
OP
9.41E+2
5.39E+1
4.75E+0
9.76E+0
1.11E+1
OP
OP
OP
8.00E+2
8.00E+2
2.51E+1
OP
9.97E+2
5.94E+1
4.84E+0
9.95E+0
1.14E+1
OP
OP
OP
9.00E+2
9.00E+2
2.85E+1
OP
OP
7.95E+1
4.99E+0
1.05E+1
1.20E+1
OP
OP
OP
1.00E+3
1.00E+3
3.25E+1
OP
OP
1.11E+2
5.08E+0
1.11E+1
1.27E+1
OP
OP
OP
Values listed under each gas type are in Torr units
Over Pressure (OP)= 1.10E+03 Torr
When using gases other than nitrogen/air, you must use the above look-up table to
determine the true pressures of selected gases as measured by convection
gauges. For example, if the gas you are using in your vacuum system chamber is
predominately argon (Ar), a displayed pressure of 1.14E+00 Torr means the actual
true pressure of argon is 2.00E+00 Torr based on the conversion information pro-
vided in the above table.
Example: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will
read only about 9 Torr.