Inficon VGC083A - Page 67

tinb29e1-c (2019-10) VGC083A_B.om 67
C) Apply the gas correction factor for the particular gas you are using to the
pressure value obtained in step A (Use correction factors and example listed
below).
Ion Gauge Gas Correction Factors for selected gases
Gas Gas
CorrectionFactor
Gas Gas
Correction Factor
He
0.18
H
2
O
1.12
Ne
0.30
NO
1.16
D
2
0.35
Ar
1.29
H
2
0.46
CO
2
1.42
N
2
1.00
Kr
1.94
Air
1.00
SF
6
2.50
O
2
1.01
Xe
2.87
CO
1.05
Hg
3.64
The gas in use is argon. Output voltage is 3 volts. Pressure unit is Torr.
The same correction factor must be applied over the entire pressure range as
measured by the ion gauge.
Example