LEYBOLD IONIVAC Series - Technical Data; Measurement Specifications

Technical Data
GA09420_002_C0 – (2016-10) –
 Leybold
7
2 Technical Data
Measurement
Display range (air, O
2
, CO, N
2,
) 5×10
-10
… 1000 mbar, continuous
Measuring range (air, O
2
, CO, N
2,
) 1×10
-8
… 10
-2
mbar, continuous
Accuracy 15% of reading
(after 5 min stabilization)
Repeatability 5% of reading
(after 5 min stabilization)
Gas type dependence
→ Appendix B
Emission
Switching on threshold
Switching off threshold
2.4×10
-2
mbar
3.2×10
-2
mbar
Emission current
p ≤7.2×10
-6
mbar
7.2×10
-6
mbar <p <3.2×10
-2
mbar
5 mA
25 µA
Emission current switching
25 µA  5 mA
5 mA  25 µA
7.2×10
-6
mbar
3.2×10
-5
mbar
Degas
Degas emission current
(p <7.2×10
-6
mbar)
≈16 mA (P
de
g
as
≈4 W)
Control input signal 0 V/+24 VDC, active high
(control via RS232 →  29)
Duration max. 3 min, followed by automatic stop
In degas mode, ITR 90 transmitters keep supplying measurement values, however
their tolerances may be higher than during normal operation.
Output signal
Output signal (measuring signal) 0 … +10 V
Display range 0.774 V … +10 V
(5×10
-10
mbar … 1000 mbar)
Relationship voltage-pressure logarithmic, 0.75 V/decade
(
→ Appendix A)
Error signal
<0.3 V/0.5 V (→  39)
Minimum load impedance
10 kΩ
Display (120 91 and 120 94)
Display panel
Dimensions
Pressure units (pressure p)
LCD matrix, 32×16 pixels,
with background illumination
16.0 mm × 11.2 mm
mbar (default), Torr, Pa
(selecting the pressure unit →  29)