3.5 Purge Gas Piping
The inlet port for the purge gas is a Swagelok 1/4” stainless connector.
Allowed purge gases are N
2
, Ar, or dry clean air. The pressure of the purge
gas can be adjusted by the pressure regulator to a suitable pressure, and the
range is 1.5 to 2 bar (g) (0.15 – 0.2 MPa (g)).
As Leybold vacuum pumps can be used for a variety of processes the
amount of sediments thus produced will also be different. In order to reduce
corrosion due to process gas and retard the accumulation of reaction
byproducts, adjust the purge gas pressure and flow to the appropriate val-
ues. Please refer to the information given in Section 1.3 Technical Data.
Ensure that the purge gas flow is not obstructed.
The purge gas supply should not be shut off while the pump system is
operat ing, above all especially not during shutdown and venting operations.
As the pumps are equipped with a 24V-operated magnetic valve in the purge
gas system, provide an adequate electrical connection. Ensure with switching
off the pump that the magnetic valve will be closed.
Overview of Rotor Purge Gas Throughput
Refer to the following table for the relationship between pressure regulator
turns and purge gas throughput (cf. Fig. 1.4):
at End Pressure
Knob turns 0.15 MPa
0 0
0.5 16
1 37
1.5 59
2 84
2.5 95
3 100
(all values in slm; ±3 slm)
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