LEYBOLD MAG W 1300 C - Page 106

GA05141_0702 - 09/2004
106
The system MAG
digital
LINE
■ turbomolecular pump
■ connecting cables
■ frequency converter
has been tested by the TÜV Rheinland of North America according to the
requirements of
■ NRTL
(used standards UL 61010A-1 and IEC 61010-1/A2) and
■ SEMI S2
The components are in compliance to the tested standards.
Certificate No. US 2271305 01, 02 and 03
v
acuum