LEYBOLD MAG W 2010 CHT - Page 12

Description
12
GA 05.139/1.02 - 06/99
10
-1
10
-2
10
-3
10
-4
50 sccm
100 sccm
200 sccm
500 sccm
1000 sccm
10
-2
10
-1
1 10
Torr
Torr
Fig. 9 MAG W 2010 CHT: operation diagram for nitrogen
High vacuum pressure
Forevacuum pressure
Rotor speed 480 Hz
Purge gas flow 36 sccm Nitrogen
with splinter guard
Forepump D 65 B + WS 251
Pipe 1 m DN 40
according to PNEUROP
1500
1000
500
0
2000
10
-2
10
-1
1
Torr
10
-3
10
-4
l/s
MAG W 2010 C
High Vacuum Pressure
Fig. 8 Pumping speed curve for Nitrogen
Pumping speed
Rotor speed 480 Hz
Purge gas flow 36 sccm Nitrogen
with splinter guard
Forepump D 65 B + WS 251
Pipe 1 m DN 40
according to PNEUROP
HT