LEYBOLD MAG W 2200 C - Page 20

GA05141_0702 - 09/2004
20
Description
0
500
1000
1500
2000
2500
3000
3500
1,00E-04 1,00E-03 1,00E-02 1,00E-01
Inlet pressure [mbar]
Pumping speed [l/s]
MAG W 3200 CT DN 320
MAG W 830 C DN 160
MAG (W) 1300 / 1500 C/CT DN 250
MAG W 2200 C DN 250
MAG W 2800 C/CT DN 250
MAG (W) 1300 / 1500 C/CT DN 200
MAG W 2200 C DN 200
Fig. 6 Pumping speed curves for Nitrogen
With purge gas
with splinter guard
Forepump 100 m
3
/h
Pipe 1 m DN 40
according to PNEUROP
10
9
10
8
10
7
10
6
10
5
10
4
10
3
10
2
10
1
10
-6
10
-4
10
-5
10
-3
10
-1
10
-2
10
0
10
1
mbar
He
H
2
N
2
MAG W 2800
MAG W 2200
MAG W 830/1300
Fig. 7 k
0
curves
Compression k
0
Forevacuum pressure