LEYBOLD MAG W 2200 C - Page 55

GA05141_0702 - 09/2004
55
Installation
lower magnetic
bearing
Motor
uppermagnetic
bearing
Sensor PVW 2,4
lower magnetic
bearing
24 V
Turbomolecular pump
Pump purge gas inlet
Vent valve: shown closed;
opens a bypass around the choke
when the pump is to be vented
Choke (capillary)
Purge gas valve: shown open
Sintered metal filter
Pressure regulator
Purge gas, e.g. N
2
, Ar or dry air
Forevacuum port
LEDs light when
the valve is
open
Fig. 39 Purge gas and vent valve assembly and turbomolecular pump (schematic)