Fig. 3.7 Schematic of a turbomolecular pump system
1 Turbomolecular pump
2 Forevacuum test point
3 Forevacuum pump
4 Anti-vibration bellows
5 Adsorption trap
6 Forevacuum valve
7 Venting valve
8 High-vacuum valve
9 Purge gas connection
10 Valve in the roughing pump line
11 Electronic frequency converter
— — — — Roughing pump line;
recommended to achieve the shortest possible
cycling times
— · — · — · — · Drive and control line
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