LEYBOLD TURBOVAC 1100 C - Page 10

Description
10
GA05118_002_C1 - 11/2017 - © Leybold
TURBOVAC 151 /
151 C
TURBOVAC 361 / 361 C
High-vacuum port DN 100 ISO-K / 100 CF 100 ISO-K • 100 CF 160 ISO-K • 160 CF
Pumping speed
N
2
Ar
He
H
2
I · s
-1
145
150
135
115
345
350
340
340
400
–
380
370
Max. gas throughput
N
2
Ar
H
2
mbar ·
I · s
-1
1,5
1,3
1
3
2,5
3
2,5
Compression
N
2
He
H
2
1 · 10
9
2 · 10
4
8 · 10
2
1 · 10
9
6 · 10
4
3 · 10
3
1 · 10
9
6 · 10
4
3 · 10
3
Speed min
-1
49 980 45 000 45 000
Ultimate pressure mbar < 1 · 10
-10
Max. Inlet pressure (permanent)
with water cooling
mbar 5 · 10
-2
Max. forevacuum pressure for N
2
mbar 5 · 10
-1
Recommended forevacuum pump TRIVAC D 4 B bis D 16 B D 16 B bis D 25 B D 16 B bis D 25 B
Run-up time to 95% nominal speed min ≈ 2
Forevacuum port DN 25 KF
Purge gas / vent port DN 10 KF
Cooling water connection (hose nozzle) mm 10
Weight, approx. kg 8 12 12
Max. power consumption / at ultimate
pressure
VA 680 / 480
Max. ambient temperature at operation °C 55
Storing temperature °C – 10 bis + 60
Max. bakeout temperature at CF flange °C 100
Fig. 1.1 TURBOVAC 151 C; TURBOVAC 361 C similar
High-vacuum port
Forevacuum port
Electrical connection
Vent port
Connection for
water cooling
Purge
gas port