TURBOVAC
600 C
TURBOVAC 1000 C TURBOVAC 1100 C
High-vacuum port DN 160 ISO-K •
160 CF
160 ISO-K
/ CF
200 ISO-K
/ CF
250
ISO-K
160
ISO-K
200
ISO-K
250
ISO-K
Pumping speed
N
2
He
H
2
I · s
-1
560
600
570
850
880
900
1100
975
970
1150
1000
1000
710
-
-
830
760
600
1050
980
630
Max. gas throughput
N
2
Ar
mbar ·
I · s
-1
< 4
< 4
6
3
6.5
6.5
Compression
N
2
He
H
2
> 10
9
2 · 10
4
1,1 · 10
3
> 10
9
5 · 10
4
2 · 10
3
> 10
5
-
10
4
Ultimate pressure mbar < 10
-10
< 10
-10
< 3 · 10
-10
Speed rpm 36,000 36,000 30,000
Run-up time (freq.
converter), approx.
min
4
9
9
Max. Inlet pressure (permanent)
with water cooling
mbar
1 · 10
-2
1 · 10
-2
1 · 10
-2
Max. forevacuum
pressure for N2
mbar 5 · 10
-2
5 · 10
-2
10
-1
Recommended forevacuum
pump
at standard operation
at purge gas operation
TRIVAC
TRIVAC
D 25 B / 40 B
40 B
D 40 B
D 65 B / Scroll SC 15/30 D
Run-up time to
95% nominal speed
min
3
-
-
Forevacuum port DN 40 KF 40 KF / 63 ISO-K 63 ISO-K
Purge gas / vent port DN 10 KF 10 KF 10 KF
Cooling water connection
(hose nozzle)
mm
10
10
10
Weight, approx. kg 17 25 22
Max. power consumption /
at ultimate pressure
VA
680 / 480
-
-
Max. ambient temperature
at operation
°C
55
55
55
Storing temperature °C – 10 to + 60 – 10 to + 60 – 10 to + 60
Max. bakeout temperature
at CF flange
°C
100
100
100
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