4.6 Bakeout
For TURBOVACs with CF flange
If pressures in the range of 10
-8
mbar or below are to be devel oped, the
vacuum chamber and the components installed therein will have to be baked
out. In addition, the TURBOVAC can be baked out using the flange heater
provided for this purpose.
Protect the rotor against intensive, direct heat radiation. When baking out at
the forevacuum side – at a sorption trap, for example – ensure that the com-
ponents attached direct are not heated to more than 100°C (212 °F).
The forevacuum pump must be in operation so as to eliminate the vapors
liberated at the sorption trap.
4.7 Removing the pump from the system
Shut down the pump and vent as described in Sections 4.4 and 4.5.
If the pump has previously handled hazardous gases, implement the pro-
per precautionary measures before opening the intake or exhaust connec-
tion.
Observe Safety Informations 0.4.6.
Disconnect the pump only when it has come to a full stop.
Then switch the mains power off and wait until the yellow power LED is off.
Then only disconnect any cable connections.
The pumps may be contaminated with process gases. These gases may be
toxic and hazardous to health. In addition, deposits with similarly dangerous
properties may have formed. Many of these gases and deposits form acids
when they come into contact with humid air. This will result in serious corro-
sion damage to the pump.
To avoid health hazards and corrosion damage when the pumps are
detached from the system, fasten a container of desiccant under the trans-
port cover of the high vacuum connection and then close the pump immedi-
ately at all flange connections. Store the pump, with a desiccant, in an air-
tight PE bag.
Corrosion damage due to faulty packing will nullify the guarantee.
Pack the pump so that it cannot be damaged during shipping and storage.
Pay particular attention to protection for the flanges and the electrical plug.
Observe the instructions in Section 5.2 if you forward the pump to Leybold.
A packing set is included with TURBOVAC models with a “C” in the type
designation. Use this packing set after detaching the pump from the system.
Packing set for high-vacuum connection flange Part No.
DN 100/160 200 91 240
DN 200 200 91 295
DN 250 200 91 262
DANGER
Hazardous gases
Deposits
Desiccant
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