If several turbomolecular pumps are installed to the vacuum chamber of the
same system, there is the risk of interference (vibration interference between
the pumps). If such a risk exists please contact Leybold Application Support.
The standard mounting arrangement for the pump is adequate to ensure
earthquake protection. If required mount the system to the floor or the walls.
Install an inlet screen
Foreign objects which enter the pump through the intake would cause seri-
ous damage to the rotor. That’s why we recommend installing an inlet
screen. Damages caused during operation without the inlet screen are
excluded from warranty.
Insert the inlet screen so that the surface curvature is at the bottom and
apply some pressure lightly at the rim so that the inlet screen engages, see
Fig. 3.1.
If dust could pass from the vacuum chamber into the pump, then a micro-
pore filter must be installed between the vacuum chamber and the pump.
Vibration influence
Earthquake protection
NOTICE
Correct
Wrong
Fig. 3.1 Installing the inlet screen
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