MKS 356 Micro-Ion Plus Series User Manual

Operation
Micro-Ion
®
Module Instruction Manual - 356007-GP 33
Installation Operation MaintenanceBefore You Begin
3.7 Read the Analog Output • The output is logarithmic, 0.50 Vdc/decade, where 1000 Torr = 7 Vdc, as
illustrated in Figure 3-6.
• Output impedance is 100 Ω.
An output signal of 10 Vdc occurs any time the gauge is intentionally turned
OFF or when an error condition occurs.
Use the following equation to convert output voltage to pressure in Torr:
Use the following equation to calculate output voltage from pressure:
To convert Torr to mbar, multiply P
Torr
by 1.333.
To convert Torr to pascal, multiply P
Torr
by 133.3.
Table 3-4 Display Resolution vs. Conductron Sensor Pressure
Measured Pressure
Display ResolutionTorr mbar Pascal
Less than 50 Less than 66 Less than 6.6 x 10
3
Two digits
50 to 100 66 to 133 6.6 x 10
3
to 13.3 x 10
4
Increments of 10 pressure units
100 to 400 133 to 533 1.33 x 10
4
to 53.3 x 10
4
Increments of 100 pressure units
400 to 760 533 to 1.00 x 10
3
5.33 x 10
4
to 1.00 x 10
5
Display reads “At”
Greater than 760 Greater than 1.00 x 10
3
Greater than 1.00 x 10
5
Display reads “At+”
P
Torr
10
V
out
5.500–
0.500
-------------------------------


=
V
out
0.500Log P
Torr
()5.500+=

MKS 356 Micro-Ion Plus Series Specifications

General

Brand	MKS
Model	356 Micro-Ion Plus Series
Category	Control Unit
Language	English