Operation
Micro-Ion
®
Module Instruction Manual - 356007-GP 35
Installation Operation MaintenanceBefore You Begin
Figure 3-7 Degas Button and LED on Module Control Panel
3.9 Calibrate the Module at
Atmosphere
An atmospheric pressure calibration of the Conductron sensor is performed
with air at the factory prior to shipment. The factory calibration sets the
atmospheric calibration point (“At”) to approximately 635 Torr (846 mbar,
8.46 x 10
4
pascal).
To ensure proper performance, the atmospheric pressure calibration of the
Conductron sensor should be reset, using the process gas, once the module
has been installed and is still at atmospheric pressure. Periodic resets of the
atmospheric pressure calibration point will improve the accuracy and
repeatability of the Conductron sensor near atmospheric pressure.
Because performance varies depending on the process gas, reset the
atmospheric calibration point if a gas other than N
2
or air is being used.
Figure 3-8 Illustrates the CAL button on the module control panel.
1. Shut OFF the pump and allow pressure in the chamber to increase to
atmospheric pressure. (Atmospheric pressure must be > 400 Torr
[533 mbar, 5.33 kPa] to enable calibration at atmosphere.)
2. To perform the atmospheric pressure calibration, press the CAL button,
or toggle pin 9 to 5 (ground) on the 15-pin subminiature D connector,
or use the RS-485 interface to send the calibration (TS) command.
Table 3-5 Micro-Ion Gauge Status LED
Degas Status LED State
Degas in progress Amber
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